Overview

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

ISBN-13

9783540853176

ISBN-10

3540853170

List Price

$229.00

Edition

3rd Edition

Format

Hardcover

Language

English

Pages

511 pages

Publisher

Springer

Published On

2020-11-15



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