
Papers from the Fourth International Plasma-Based Ion Implantation Workshop
by Joseph Vito Mantese (Editor)Carlton E. Speck (Editor)American Vacuum Society Staff (Contribution by)
Format: Hardcover
ISBN13: 9781563968846
Hardcover|9781563968846
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| ISBN-13 | 9781563968846 |
|---|---|
| ISBN-10 | 1563968843 |
| Format | Hardcover |
|---|---|
| Pages | 798 pages |
| Publisher | |
| Published On | 1999-01-01 |
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