Nanopositioning Technologies
Format: Hardcover
ISBN13: 9783319238524
Hardcover|9783319238524
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Overview
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
| ISBN-13 | 9783319238524 |
|---|---|
| ISBN-10 | 3319238523 |
| Weight | 2.13 Pounds |
| Dimensions | 6.14 x 0.94 x 9.21 In |
| List Price | $109.99 |
| Edition | 1st Edition |
| Format | Hardcover |
|---|---|
| Language | English |
| Pages | vi, 409 pages |
| Publisher | Springer |
| Published On | 2016-01-07 |
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Alibris
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Print on demand Sewn binding. Cloth over boards. 409 p. Contains: Unspecified, Illustrations, black...
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Access codes and supplements are not guaranteed with used items. May be an ex-library book.
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