Microsystem Technology and Microrobotics
Format: Hardcover
ISBN13: 9783540606581
Hardcover|9783540606581
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Overview
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
| ISBN-13 | 9783540606581 |
|---|---|
| ISBN-10 | 3540606580 |
| Weight | 3.77 Pounds |
| Dimensions | 6.14 x 1.00 x 9.21 In |
| List Price | $199.99 |
| Edition | 1st Edition |
| Format | Hardcover |
|---|---|
| Language | English |
| Pages | xii, 408 pages |
| Publisher | Springer |
| Published On | 1997-03-20 |
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